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David Lanzendörfer, 08/15/2021 12:00 AM
Maskless lithography¶
A minimalist, maximally inexpensive patterning system for exposing 50 micron patterns onto photo resist.
For cost reasons we use long wave UV light , which allows us to use the much less expensive visible light DMD chips from Texas Instruments, which can operate with UV light down to 400nm.
Candidates for DMD chips¶
| Name | Amount | Long description | Link | Price |
| DMD Chip | 1 | DLP2000: DLP display suitable for visible UV light | https://www.ti.com/dlp-chip/display-and-projection/pico-chipsets/getting-started.html | |
| Linear actuator | 2 | Linear actuator with a precision of 20um~30um | https://www.aliexpress.com/item/4001272086575.html | |
| UV LED | 1 | UV LED in the visible spectrum (420nm) | https://eu.mouser.com/ProductDetail/Inolux/IN-3531SCUV-U70?qs=b%252BbDuRW3oLzkxuDRNctYRA%3D%3D | |
| IR LED | 4 | L13072-0120K: IR LED for shining through the wafer in order to detect the alignment markers, wave length: 1200 nm |
https://www.hamamatsu.com/eu/en/product/type/L13072-0120K/index.html |
Resist¶
| Name | Thickness | Type | Wavelengths | Developer |
| AZ 1512 | 1.2 um | positive | 310-440 nm | |
| AZ 9260 | 5-20 um | positive | 365-435 nm | |
| AZ 4210 | 2–4 um | positive | 350-450nm | KOH |
Updated by David Lanzendörfer over 2 years ago · 15 revisions