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David Lanzendörfer, 08/10/2021 12:04 AM


Maskless lithography

A minimalist, maximally inexpensive patterning system for exposing 50 micron patterns onto photo resist.
For cost reasons we use long wave UV light , which allows us to use the much less expensive visible light DMD chips from Texas Instruments, which can operate with UV light down to 400nm, in combination with the ma-P 1200G resist (PDF provided), which has a sensitivity between 350nm and 450nm.

Candidates for DMD chips

Name Amount Long description Link
DMD Chip 1 DLP2000: DLP display suitable for visible UV light https://www.ti.com/dlp-chip/display-and-projection/pico-chipsets/getting-started.html
Linear actuator 2 Linear actuator with a precision of 20um~30um https://www.aliexpress.com/item/4001272086575.html
UV LED 1 UV LED in the visible spectrum (420nm) https://eu.mouser.com/ProductDetail/Inolux/IN-3531SCUV-U70?qs=b%252BbDuRW3oLzkxuDRNctYRA%3D%3D
IR LED 4 L13072-0120K: IR LED for shining through the wafer in order to detect the alignment markers (wave length: 1200 nm
)
https://www.hamamatsu.com/eu/en/product/type/L13072-0120K/index.html

Updated by David Lanzendörfer over 2 years ago · 7 revisions